In this work, we reported fabrication of a soft PDMS stamp with nano-micro hybrid pattern based on nanoimprint lithography process. A combination of nanoimprint lithography and optical lithography was employed to fabricate a silicon master mold with nano-micro hybrid pattern. PDMS replication process was performed on the master mold. As a result, nano-hole patterns on interdigitated microelectrodes were successfully fabricated on soft PDMS stamp. The PDMS stamp with nano-micro hybrid pattern can be used for fabrication of micro-supercapacitor electrodes with large power density and biosensors with high sensitivity.