November 03 (Friday)
마이크로/나노공학부문 포스터
Poster,
3층 로비,
09:50~10:40
  • Chair :
  •  옥종걸(서울과기대), 장원석(기계연), 강현욱(전남대), 심형철(기계연)
Fr16A-1
09:50~10:40

미소 반도체 소자의 전사를 위한 휘어짐이 가능한 엘라스토머 스탬프의 접착력 조절

조성범, 이종호(광주과학기술원)
Fabricating micro electronic devices need to integrate the devices onto various substrates. However, processing temperature and electrical or thermal resistance may increase if liquid adhesive is used when placing the micro electronic devices onto the substrate.This presentation suggests an effective method of transfer printing that does not use the liquid adhesive at the interlayer of the devices and the substrates. Controlled adhesion force of an elastomeric stamp by varying bending radius of the stamp results in picking up or printing of micro semiconductor plates. The capability of switching adhesion enables transfer printing the micro semiconductor plates onto curvilinear, or flexible substrates without the liquid adhesive. Several theoretical or experimental studies support the mechanism of the suggested method.
Keywords : transfer printing (전사), adhesion force (접착력), elastomeric stamp (엘라스토머 스탬프)
Paper : Fr16A-1.pdf

(사)대한기계학회, 서울시 강남구 테헤란로 7길 22 한국과학기술회관 신관 702호, Tel: (02)501-3646~3648, E-mail: ksme@ksme.or.kr