Session Track
November 03 (Friday)
마이크로/나노공학부문 포스터
Poster,
3층 로비,
09:50~10:40
- 옥종걸(서울과기대), 장원석(기계연), 강현욱(전남대), 심형철(기계연)
Fr16A-22
09:50~10:40
Modeling and design of AlN piezoelectric microcantilevers for rheological properties analysis
This paper reports modeling and design of AlN piezoelectric microcantilevers for operation in liquid environments. Microcantilever sensors demonstrates high sensitivity and measurement resolution for rheological properties analysis and biological event detection while used in liquid media. However, a hydrodynamic force induced by a liquid causes a damping effect on a microcantilever, and such damping directly impacts the dynamic response of a microcantilever. This is related on the performance of the microcantilever sensor. To develop AlN piezoelectric microcantilevers for in-liquid application, it is necessary to simulate various cantilever dimensions and find the optimal design. In addition, the impact of various liquid properties (i.e. viscosity, density, specific heat, etc.) on the cantilever operation should be fully understood. To find the optimal design of the AlN piezoelectric microcantilever sensor, the methods of analytical and numerical modeling were used. For simulation, COMSOL Multiphysics 5.3 Fluid-Structure Interaction study was used. To validate our microcantilever-liquid interaction modeling, we compared the simulation and experiment results of silicon AFM cantilevers with various dimensions in different liquid media. The validated modeling and simulation methods will be applied to develop AlN piezoelectric cantilevers with multiple vibration mode (transverse, contour, and thickness-modes) for various in-liquid application areas.
Keywords : Microcantilever, Cantilever, Viscosity, MEMS
Paper : Fr16A-22.pdf
(사)대한기계학회, 서울시 강남구 테헤란로 7길 22 한국과학기술회관 신관 702호, Tel: (02)501-3646~3648, E-mail: ksme@ksme.or.kr