November 03 (Friday)
마이크로/나노공학부문 포스터
Poster,
3층 로비,
09:50~10:40
  • Chair :
  •  옥종걸(서울과기대), 장원석(기계연), 강현욱(전남대), 심형철(기계연)
Fr16A-26
09:50~10:40
Quartz Tuning Forks with Hydrogel Printed by Dynamic Mask Lithography for Humidity Sensing Applications
고주희, 윤여원, 이보라, 이정철(서강대학교)
This paper reports a new humidity sensing platform based on quartz tuning forks (QTFs) with hydrogel printed. Commercial quartz tuning forks are placed into a polydimethylsiloxane (PDMS) mold to make a flat plane between two prongs where hydrogel prepolymer is dispensed and cured as specific shapes and sizes by digital micromirror device (DMD)-based dynamic mask lithography. To control the thickness of hydrogel structures, a PDMS cover with 10-μm deep recess is also placed on top of the QTF-PDMS mold assembly. Once polyethyleneglycol diacrylate (PEG-DA, MW575) mixed with a photoinitiator is introduced into the empty space between the PDMS cover and the QTF-PDMS mold assembly, the dynamic mask is projected. Each QTF with printed PEG-DA structures is characterized and used for humidity sensing experiments. To maximize the responsivity to the ambient humidity, optimized shape, size, and placement of hydrogel patterns are experimentally explored. In addition, the humidity sensing resolution is investigated by the Allan deviation analysis.
Keywords : Dynamic mask lithography(동적 마스크 리소그래피), Humidity sensor(습도 센서), Hydrogel(하이드로젤), Quartz tuning forks(석영 튜닝 포크)
Paper : Fr16A-26.pdf

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