In this study anodizing process with aluminum alloy was conducted to obtain an ordered hexagonal Anodic Aluminum Oxide(AAO). Aluminum alloy with relatively low purity (99.5%) was annealed to remove residual stress and internal crack of the aluminum. Then, electrolytic polishing was conducted to minimize surface roughness. Anodizing was carried out for two step to obtain well organized nanostructure. To improve durability of the AAO structure, metal and organic thin film with thickness in nanometer scale were deposited on its surface. Characteristics of the thin films for protection of AAO surface was examined using precision tribometer. As the result, it was revealed that both thin films enhanced durability of the AAO structure. Particularly, organic thin film exhibited outstanding protective characteristics to maintain AAO surface intact.