Session Track
November 02 (Thursday)
동역학 및 제어부문 포스터
Poster,
3층 로비,
13:00~13:50
- 손정현(부경대), 안형준(숭실대), 임성진(서울과기대), 김건우(생기연)
Th16A-22
13:00~13:50
이중 컴파운드 유연기구 스테이지를 위한 광학 삼각측정 센서
We propose an optical triangulation displacement sensor for a double compound flexure stages. In this model, a pair of mirrors is installed on the two levers of the double compound flexure stage and the lever rotates linearly according to the displacement of the moving platform to be measured. According to the symmetric rotation of the two mirrors, the reflection angle of the laser is amplified and the sensitivity is increased compared to a conventional optical triangulation.
Keywords : Optical sensor(광학 센서), Triangular sensor(삼각측정 센서), Flexure mechanism(유연기구)
Paper : Th16A-22.pdf
(사)대한기계학회, 서울시 강남구 테헤란로 7길 22 한국과학기술회관 신관 702호, Tel: (02)501-3646~3648, E-mail: ksme@ksme.or.kr