With increasing interest in flexible displays, research of transparent conductive oxides (TCO) used as electrodes of plastic substrate is required. Among the various materials for TCO applications, Al-doped ZnO (AZO) thin film is appealing because of cheap, high electrical conductivity and high optical transmittance. The importance of improving the mechanical properties of AZO is increasing for application to flexible substrates. In this study, AZO-alucone hybrid thin films were deposited on transparent polyimide using ALD and MLD techniques. The alucone layers were inserted between AZO layers to act as a buffer layer. The characteristics and properties of thin films vary with process temperature change, so samples were fabricated with various temperature conditions and tested using a micro tensile tester.