Metamaterials, artificially structured materials composed of sub-wavelength unit cells, have enabled the exotic optical properties and extraordinary phenomena such as invisibility cloaking and negative refraction. Current metamaterials are much focused on nanoscale optical metamaterials, working at ultra-violet (UV), visible and near-infrared (NIR) frequencies for practical applications of them. The optical metamaterials demonstration highly relies on nanofabrication. The main challenges in the nanofabrication for the metamaterials are 3D fabrication and large-scale fabrication. Here, we demonstrate ultra-high accurate and precise electron beam ltihography (EBL) overlay process exhibiting sub-20nm alignment errors and over-75% repeatability. Using the EBL overlay process, we fabricate several kinds of 3D optical metamaterials and unconventional 2D hybrid plasmonic nanoantennas.