As a demand for highly integrated mechanical systems such as precision robots increases, research on miniaturization as well as performance improvement of devices is getting more attention. Recently, development of smart materials such as a piezo has been accelerated for the miniaturization of the power source, and researches on the development and miniaturization of the driving device have been increased. In this study, the membrane pump using the piezoelectric actuator was analyzed. First, the pump was designed and fabricated to verify the performance, and the basic flow rate experiment was conducted. The body of the pump is made of a transparent material to measure the internal flow for precise analysis of the flow field. Numerical analysis for the performance was also performed using the FSI-2way method, which is suitable for simulating the movement of the membrane valves. Both the experimental and CFD results showed that the maximum flow rate was obtained at 50 Hz and the maximum flow velocity was 5.88 mm/s for the experiment and 5.33 mm/s for the numerical analysis, and the error was 9.35 %. The reliability of the numerical analysis could be obtained by the comparison with the experiment, and it is expected that the FSI-2way technique can be reliably used for the research on performance improvement of the pump.