November 02 (Thursday)
용접 및 특수가공/절삭가공/기타
Oral,
제13발표장(401B호),
14:10~15:10
  • Chair :
  •  이동윤(생기원)
Th13E-4
14:10~15:10
액체 금속의 상 변화와 유연 기판의 탄성 변형을 활용한 고해상도 액체 금속 패터닝
김도윤(서울대학교 기계항공공학부 박사과정), 윤용(서울대학교 기계항공공학부), 이정철(서강대학교), 고상근(서울대학교 공과대학)
Recently, eutectic gallium indium has been actively investigated towards stretchable and wearable electronic devices with the aid of high fluidity, high electrical conductivity and low toxicity. However, high surface tension along with spontaneous oxidation makes it difficult to realize fine patterning below ~10 μm, thus physical molding into an elastomeric mold is thought to be a unique solution. Here, we present a novel manufacturing technique that enables EGaIn patterns of single-digit micrometer width without using a guide mold for the first time. First, we made a custom directing printing setup to enable continuous and uniform printing of EGaIn. Next, to make a single-digit micrometer pattern, we stretched the initial printed line, froze it, and then transferred it to an unstretched Ecoflex substrate. With the proposed idea, a 2 μm wide linear pattern, 60-fold reduction with respect to the initial dimension, is obtained. For practical applications, strain and pressure sensors are demonstrated with width-reduced EGaIn patterns.
Keywords : Liquid metal(액체 금속), EGaIn(갈륨 , 인듐 합금), Ecoflex(실리콘 형 유연 기판), Flexible sensor(유연 센서), Phase change(상 변화), Liquid metal direct writing system(액체 금속 패터닝 시스템)
Paper : Th13E-4.pdf

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